The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2019
Filed:
Jul. 01, 2014
Applicant:
Fujibo Holdings, Inc., Chuo-ku, Tokyo, JP;
Inventors:
Assignee:
FUJIBO HOLDINGS, INC., Chuo-Ku, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/24 (2012.01); H01L 21/02 (2006.01); H01L 21/322 (2006.01); B24D 3/28 (2006.01);
U.S. Cl.
CPC ...
B24B 37/24 (2013.01); B24D 3/28 (2013.01); H01L 21/02013 (2013.01); H01L 21/3221 (2013.01);
Abstract
A polishing pad comprising a resin-containing polishing cloth having a polishing cloth base impregnated with a polyurethane resin and silicon carbide, wherein the silicon carbide has a particle diameter in a range from 0.2 to 3.0 μm, and the content of the silicon carbide in the resin-containing polishing cloth is in a range from 60 to 500 parts by mass relative to 100 parts by mass of the polishing cloth base.