The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 2019

Filed:

Mar. 03, 2016
Applicant:

Motorola Mobility Llc, Chicago, IL (US);

Inventors:

Richard W Brotzman, Naperville, IL (US);

Ernest Sirois, Crystal Lake, IL (US);

Deborah Paskiewicz, Downers Grove, IL (US);

Assignee:

Motorola Mobility LLC, Chicago, IL (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01K 3/28 (2006.01); C23C 16/505 (2006.01); B05D 1/00 (2006.01); H05K 3/28 (2006.01); C09D 183/04 (2006.01); B05D 5/08 (2006.01); C09D 183/08 (2006.01); C23C 16/30 (2006.01); C08G 77/24 (2006.01); C08G 77/00 (2006.01);
U.S. Cl.
CPC ...
H05K 3/28 (2013.01); B05D 1/62 (2013.01); B05D 5/08 (2013.01); C09D 183/04 (2013.01); C09D 183/08 (2013.01); C23C 16/30 (2013.01); C23C 16/505 (2013.01); H05K 3/281 (2013.01); C08G 77/24 (2013.01); C08G 77/80 (2013.01);
Abstract

A method of forming a polysiloxane film on a substrate comprises polymerizing a siloxane monomer in a reaction chamber containing the substrate. The polymerization is catalyzed by a 30-60 W radio frequency plasma, the pressure in the reaction chamber during the polymerization is 100-400 mTorr, the residence time of the siloxane monomer in the reaction chamber is 5-120 minutes, the siloxane monomer is heated to 30-200° C. before entering the reaction chamber, and the polymerization is carried out at a temperature of 30-100° C.


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