The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2019
Filed:
Jan. 20, 2016
Ngk Insulators, Ltd., Aichi, JP;
Ngk Ceramic Device Co., Ltd., Aichi, JP;
Tomoyoshi Tai, Inazawa, JP;
Yuji Hori, Owariasahi, JP;
Takahiro Yamadera, Nagoya, JP;
Ryosuke Hattori, Ichinomiya, JP;
Kengo Suzuki, Nagoya, JP;
NGK INSULATORS, LTD., Aichi, JP;
NGK CERAMIC DEVICE CO., LTD., Aichi, JP;
Abstract
In the composite substrate, the piezoelectric substrateand the support substrateare bonded by direct bonding using an ion beam. One surface of the piezoelectric substrateis a negatively-polarized surfaceand another surface of the piezoelectric substrateis a positively-polarized surface. An etching rate at which the negatively-polarized surfaceis etched with a strong acid may be higher than an etching rate at which the positively-polarized surfaceis etched with the strong acid. The positively-polarized surfaceof the piezoelectric substrateis directly bonded to the support substrate. The negatively-polarized surfaceof the piezoelectric substratemay be etched with the strong acid.