The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2019
Filed:
Jul. 20, 2016
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Inventors:
Doojin Kim, Asan-si, KR;
Youngsik Kim, Cheonan-si, KR;
Kunho Song, Asan-si, KR;
Yongdae Ha, Asan-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 27/00 (2006.01); H01L 21/683 (2006.01); B24B 37/10 (2012.01); B24B 37/30 (2012.01); B24B 37/34 (2012.01); H01L 21/687 (2006.01); B25B 11/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); B24B 27/0061 (2013.01); B24B 37/10 (2013.01); B24B 37/30 (2013.01); B24B 37/345 (2013.01); H01L 21/68785 (2013.01); B25B 11/005 (2013.01);
Abstract
A chuck table is provided and a substrate processing system including the same. The chuck table includes a base disk having a first vacuum hole, and a chuck disk disposed on the first vacuum hole. The chuck disk includes a plurality of first sectors and a first connection member connecting the first sectors to each other.