The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 2019

Filed:

Jul. 11, 2016
Applicant:

Nidec Sankyo Corporation, Suwa-gun, Nagano, JP;

Inventor:

Shigeyuki Kaino, Nagano, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); H01L 21/67173 (2013.01); H01L 21/67703 (2013.01); H01L 21/67736 (2013.01); H01L 21/67745 (2013.01); H01L 21/67748 (2013.01); H01L 21/67778 (2013.01);
Abstract

The present application provides a workpiece transfer system in which a production efficiency of a production line to be used can be improved. For example, a workpiece transfer systemincludes: robots&placed in front of process modules&for conducting a predetermined processing operation on a workpiece W, the robots&bringing the workpiece W into the process modules&and taking the workpiece W out of the process modules&; a workpiece storage unitfor storing the workpiece W to be brought into the process modules&and the workpiece W taken out of the process modules&; and a transfer mechanismfor transferring the workpiece storage unitin a direction almost perpendicular to a direction of bringing in and taking out the workpiece W for the process modules&


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