The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2019
Filed:
May. 19, 2017
Stacked film, electronic device substrate, electronic device, and method of fabricating stacked film
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Takao Noguchi, Tokyo, JP;
Yoshihiko Yano, Tokyo, JP;
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/70 (2006.01); H01L 21/82 (2006.01); H01L 27/02 (2006.01); H01L 27/06 (2006.01); H01L 27/12 (2006.01); H01L 21/02 (2006.01); H01L 21/822 (2006.01); H01L 29/51 (2006.01); H01L 41/08 (2006.01); H01L 41/319 (2013.01); H01L 49/02 (2006.01); H01H 57/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02189 (2013.01); H01L 21/707 (2013.01); H01L 21/822 (2013.01); H01L 21/8221 (2013.01); H01L 27/0211 (2013.01); H01L 27/06 (2013.01); H01L 27/0688 (2013.01); H01L 27/12 (2013.01); H01L 29/513 (2013.01); H01L 41/0815 (2013.01); H01L 41/319 (2013.01); H01H 2057/006 (2013.01); H01L 28/55 (2013.01); H01L 28/65 (2013.01);
Abstract
A stacked film is a stacked film including an oxide film, and a metal film provided on the oxide film, in which the oxide film includes a ZrOfilm of which a main surface is a (001) plane, the metal film includes a Pt film or a Pd film that has a single orientation and of which a main surface is a (001) plane, and a [100] axis of the ZrOfilm and a [100] axis of the metal film are parallel to an interface between the oxide film and the metal film, and the axes of both are parallel to each other.