The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2019
Filed:
Jun. 03, 2016
Lam Research Corporation, Fremont, CA (US);
Devon Pelkey, Tualatin, OR (US);
Dirk Rudolph, Dundee, OR (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A power converter module is connected to an electrical power supply and is configured to generate a first voltage and a second voltage for controlling operation of a valve, where the valve includes a solenoid for affecting opening and closing of the valve. The first voltage is a boost voltage for accelerating opening of the valve. The second voltage is a holding voltage for maintaining the valve in an open state. A boost control module is configured to control supply of the first voltage to the solenoid of the valve in accordance with a first state of an opening boost control signal when a valve control signal directs opening of the valve, and is configured to control supply of the second voltage to the solenoid of the valve in accordance with a second state of the opening boost control signal when the valve control signal directs opening of the valve.