The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2019
Filed:
Sep. 27, 2016
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Ryo Nawata, Utsunomiya, JP;
Kenji Noda, Utsunomiya, JP;
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H02P 25/032 (2016.01);
U.S. Cl.
CPC ...
G03F 7/70808 (2013.01); G03F 7/709 (2013.01); G03F 7/70833 (2013.01); H02P 25/032 (2016.02);
Abstract
The present invention provides a vibration control apparatus which controls vibration of an object supported via a support having a damping coefficient, the apparatus comprising a driving device configured to drive the object, and a controller configured to perform negative feedback control of the driving device based on information of vibration of the object, wherein the controller is configured to perform positive feedback control of the driving device based on information of a velocity of the object so as to reduce a force which the support causes to act on the object in accordance with the velocity.