The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2019
Filed:
Oct. 20, 2017
Applicants:
Boe Technology Group Co., Ltd., Beijing, CN;
Hefei Boe Optoelectronics Technology Co., Ltd., Hefei, Anhui, CN;
Inventors:
Assignees:
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Hefei, Anhui, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70783 (2013.01); G03F 7/7035 (2013.01);
Abstract
The embodiments of the disclosure relate to a proximity exposure device and an exposure method thereof. The proximity exposure device includes: a loading table; a holder mounted onto the loading table to hold a mask; a vacuum hood arranged above the mask to form a sealed space above the mask; and a pumping mechanism connected to the vacuum hood to pump air from the vacuum hood such that a negative pressure state is formed above the mask.