The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 2019

Filed:

Feb. 15, 2016
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Guenther Ruhl, Regensburg, DE;

Thomas Hirsch, Regensburg, DE;

Gerhard Poeppel, Duggendorf, DE;

Herbert Roedig, Riemerling, DE;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 17/00 (2006.01); G01N 27/22 (2006.01); G01N 15/10 (2006.01);
U.S. Cl.
CPC ...
G01N 27/221 (2013.01); G01N 15/10 (2013.01); G01N 2015/1087 (2013.01); G01N 2015/1093 (2013.01); G01N 2027/222 (2013.01);
Abstract

According to various embodiments, a sensor arrangement for particle analysis may include: a base electrode configured to generate an electrical field for particle attraction; a support layer disposed over the base electrode; a sensor array disposed over the support layer and including or formed from a plurality of sensor elements, wherein each sensor element of the plurality of sensor elements is configured to generate or modify an electrical signal in response to a particle at least one of adsorbed to and approaching the sensor element; and an electrical contact structure may include or be formed from a plurality of contact lines, wherein each contact line of the plurality of contact lines is electrically connected to a respective sensor element of the plurality of sensor elements, such that each sensor element of the plurality of sensor elements is addressable via the contact structure.


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