The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 2019

Filed:

Apr. 13, 2015
Applicant:

Snaptrack, Inc., San Diego, CA (US);

Inventors:

Philip Jason Stephanou, Mountain View, CA (US);

David William Burns, San Jose, CA (US);

Ravindra Vaman Shenoy, Dublin, CA (US);

Assignee:

SNAPTRACK Inc., Campbell, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5769 (2012.01); H01L 41/312 (2013.01); H01L 41/311 (2013.01); H01L 41/25 (2013.01); G01C 19/5719 (2012.01); G01C 25/00 (2006.01); G01P 15/08 (2006.01); G01C 19/5712 (2012.01); G01P 15/125 (2006.01); G01P 15/18 (2013.01); G01C 19/5747 (2012.01);
U.S. Cl.
CPC ...
G01C 19/5769 (2013.01); G01C 19/5712 (2013.01); G01C 19/5719 (2013.01); G01C 19/5747 (2013.01); G01C 25/00 (2013.01); G01P 15/0802 (2013.01); G01P 15/125 (2013.01); G01P 15/18 (2013.01); H01L 41/25 (2013.01); H01L 41/311 (2013.01); H01L 41/312 (2013.01); G01P 2015/082 (2013.01); Y10T 29/42 (2015.01); Y10T 29/49002 (2015.01); Y10T 29/49005 (2015.01); Y10T 29/49155 (2015.01);
Abstract

This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using accelerometers. Some such accelerometers include a substrate, a first plurality of electrodes, a second plurality of electrodes, a first anchor attached to the substrate, a frame and a proof mass. The substrate may extend substantially in a first plane. The proof mass may be attached to the frame, may extend substantially in a second plane and may be substantially constrained for motion along first and second axes. The frame may be attached to the first anchor, may extend substantially in a second plane and may be substantially constrained for motion along the second axis. A lateral movement of the proof mass in response to an applied lateral acceleration along the first or second axes may result in a change in capacitance at the first or second plurality of electrodes.


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