The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 2019

Filed:

Apr. 19, 2013
Applicant:

Lawrence Livermore National Security, Llc, Livermore, CA (US);

Inventors:

Manyalibo Joseph Matthews, Livermore, CA (US);

Selim Elhadj, Livermore, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/02 (2006.01); C23C 16/04 (2006.01); C23C 16/46 (2006.01); C23C 16/48 (2006.01); C23C 16/52 (2006.01); C03C 17/245 (2006.01); C23C 16/448 (2006.01); H01L 21/268 (2006.01);
U.S. Cl.
CPC ...
C23C 16/047 (2013.01); C03C 17/245 (2013.01); C23C 16/0263 (2013.01); C23C 16/4488 (2013.01); C23C 16/46 (2013.01); C23C 16/483 (2013.01); C23C 16/52 (2013.01); H01L 21/268 (2013.01); C03C 2217/213 (2013.01); C03C 2218/152 (2013.01);
Abstract

An atmospheric, Laser-based Chemical Vapor Deposition (LCVD) technique provides highly localized deposition of material to mitigate damage sites on an optical component. The same laser beam can be used to deposit material as well as for in-situ annealing of the deposited material. The net result of the LCVD process is in-filling and planarization of a treated site, which produces optically more damage resistant surfaces. Several deposition and annealing steps can be interleaved during a single cycle for more precise control on amount of deposited material as well as for increasing the damage threshold for the deposited material.


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