The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2019
Filed:
May. 11, 2015
Applicant:
3m Innovative Properties Company, St. Paul, MN (US);
Inventors:
Phillip J. Bergeron, Austin, TX (US);
Brent D. Lunceford, Austin, TX (US);
John D. Geissinger, Austin, TX (US);
Douglas B. Gundel, Cedar Park, TX (US);
Justine A. Mooney, Austin, TX (US);
Ravi Palaniswamy, Singapore, SG;
Siang Sin Foo, Singapore, SG;
Assignee:
3M INNOVATIVE PROPERTIES COMPANY, St. Paul, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0021 (2013.01); B81C 1/00182 (2013.01); B81B 2201/0235 (2013.01); B81B 2207/053 (2013.01);
Abstract
A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a polymer layer between two metal layers with one of the metal layers containing a perforation. The polymer layer includes voided regions that allow for relative movement of the two metal layers.