The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 2019

Filed:

Dec. 04, 2014
Applicant:

Dexerials Corporation, Tokyo, JP;

Inventors:

Yutaka Muramoto, Miyagi, JP;

Masanao Kikuchi, Miyagi, JP;

Shunichi Kajiya, Miyagi, JP;

Takaaki Otowa, Miyagi, JP;

Yasuhiro Takahashi, Miyagi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B29D 11/00 (2006.01); B29C 41/28 (2006.01); G11B 7/26 (2006.01); C03C 15/00 (2006.01); B29C 33/38 (2006.01); B29C 59/04 (2006.01); B29C 33/42 (2006.01); B29C 35/08 (2006.01); G03F 7/00 (2006.01); G03F 7/24 (2006.01); B29L 11/00 (2006.01);
U.S. Cl.
CPC ...
B29D 11/0074 (2013.01); B29C 33/38 (2013.01); B29C 33/3842 (2013.01); B29C 33/424 (2013.01); B29C 35/0805 (2013.01); B29C 41/28 (2013.01); B29C 59/04 (2013.01); C03C 15/00 (2013.01); G03F 7/0002 (2013.01); G03F 7/24 (2013.01); G11B 7/261 (2013.01); B29C 35/0888 (2013.01); B29C 59/046 (2013.01); B29K 2909/08 (2013.01); B29L 2011/00 (2013.01); C03C 2218/34 (2013.01);
Abstract

Provided are a cylindrical base, a master and a method for manufacturing a master enabling a uniform transfer of a fine pattern. A cylindrical base of a quartz glass having an internal strain in terms of birefringence of less than 70 nm/cm is used. A resist layer is deposited to an outer circumference surface of this cylindrical base, a latent image is formed on the resist layer, the latent image formed on the resist layer is developed and the pattern of the developed resist layer is used as a mask for etching to form a structure including concaves or convexes arranged in a plurality of rows on the outer circumference surface of the cylindrical base.


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