The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 12, 2019

Filed:

Nov. 10, 2016
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Yongseok Lee, Hwaseong-si, KR;

Jeongyun Lee, Yongin-si, KR;

Gigwan Park, Hwaseong-si, KR;

Keo Myoung Shin, Seoul, KR;

Hyunji Kim, Suwon-si, KR;

Sangduk Park, Hwaseong-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 27/092 (2006.01); H01L 29/06 (2006.01); H01L 29/423 (2006.01); H01L 21/8238 (2006.01); H01L 49/02 (2006.01); H01L 29/165 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7843 (2013.01); H01L 21/823814 (2013.01); H01L 21/823821 (2013.01); H01L 27/092 (2013.01); H01L 27/0924 (2013.01); H01L 28/00 (2013.01); H01L 29/0649 (2013.01); H01L 29/42372 (2013.01); H01L 29/6656 (2013.01); H01L 29/66545 (2013.01); H01L 29/7848 (2013.01); H01L 29/165 (2013.01);
Abstract

A semiconductor device includes an active pattern having sidewalls defined by a device isolation pattern disposed on a substrate and an upper portion protruding from a top surface of the device isolation pattern, a liner insulating layer on the sidewalls of the active pattern, a gate structure on the active pattern, and source/drain regions at both sides of the gate structure. The liner insulating layer includes a first liner insulating layer and a second liner insulating layer having a top surface higher than a top surface of the first liner insulating layer. Each of the source/drain regions includes a first portion defined by the second liner insulating layer, and a second portion protruding upward from the second liner insulating layer and covering the top surface of the first liner insulating layer.


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