The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2019
Filed:
Aug. 16, 2016
Handle substrate of composite substrate for semiconductor, and composite substrate for semiconductor
Applicant:
Ngk Insulators, Ltd., Aichi-prefecture, JP;
Inventors:
Akiyoshi Ide, Kasugai, JP;
Tatsuro Takagaki, Nagoya, JP;
Sugio Miyazawa, Kasugai, JP;
Yasunori Iwasaki, Kitanagoya, JP;
Assignee:
NGK INSULATORS, LTD., Aichi-prefecture, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 21/86 (2006.01); H01L 21/3105 (2006.01); H01L 21/321 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/86 (2013.01); H01L 21/31053 (2013.01); H01L 21/32105 (2013.01); H01L 21/76251 (2013.01); H01L 21/76256 (2013.01); H01L 27/1203 (2013.01);
Abstract
A handle substrate of a composite substrate for a semiconductor includes a base substrate comprising a polycrystalline material; and an amorphous layer provided over the base substrate, the amorphous layer having chemical resistance and comprising a single component with a high purity.