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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10204820 B1

PDFFull Text
Date of Patent:
Feb. 12, 2019

Filed:

May. 19, 2015

Multi-size adaptable spin chuck system

Applicant:

Cost Effective Equipment Llc, Rolla, MO (US);

Inventors:

Kirk Emory, Rolla, MO (US);

Brandon Wilson, Rolla, MO (US);

Roger Ruesing, Rolla, MO (US);

Assignee:

Cost Effective Equipment LLC, Rolla, MO (US);

Attorney:

Hovey Williams LLP

Primary Examiner:

Karl Kurple

Int. Cl.
CPC ...
H01L 21/687 (2006.01); B05D 1/00 (2006.01); G03F 7/16 (2006.01); B05C 11/08 (2006.01); B05C 13/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68785 (2013.01); H01L 21/68792 (2013.01); B05C 11/08 (2013.01); B05C 13/02 (2013.01); B05D 1/005 (2013.01); G03F 7/162 (2013.01); H01L 21/6715 (2013.01); Y10T 29/50 (2015.01); Y10T 279/11 (2015.01);
Abstract

A novel interchangeable spin chuck system is provided that allows the user to quickly change substrate sizes and spin chuck styles without any extra tools. This system has a two-piece design and overcomes many of the drawbacks of previous spin chuck designs, such as difficulty in seating the spin chuck and ensuring that the spin chuck is at a consistent flatness and height. Furthermore, this spin chuck system allows the spin chucks to be manufactured at a lower cost. Thus, rather than restricting users to 'make do' with incorrect spin chucks due to budget limitations, this economical design gives users access to a wider range of spin chuck sizes and styles.

Find Patent Forward Citations

Emory, Kirk. (2019). Multi-size adaptable spin chuck system (U.S. Patent No. 10204820). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10204820

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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