The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 12, 2019

Filed:

Sep. 29, 2016
Applicants:

Boe Technology Group Co., Ltd., Beijing, CN;

Hefei Xinsheng Optoelectronics Technology Co., Ltd., Hefei, CN;

Inventors:

Xuequan Jin, Beijing, CN;

Chia Hao Chang, Beijing, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/687 (2006.01); H01L 51/00 (2006.01); H01L 51/56 (2006.01); H01L 27/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); H01L 21/68742 (2013.01); H01L 21/68785 (2013.01); H01L 51/0008 (2013.01); H01L 51/56 (2013.01); H01L 27/3244 (2013.01); H01L 2227/323 (2013.01);
Abstract

A substrate retaining carrier, a method for retaining and separating the substrate, and a method for evaporation are provided. The substrate retaining carrier includes a substrate stage and a movable substrate retaining support device, the substrate retaining support device comprises multiple probes and a probe holder, wherein a first end of each of the probes is provided with a substrate retaining member, and a second end of each of the probes is secured onto the probe holder; the substrate stage is provided with through holes for passage of the probes therein.


Find Patent Forward Citations

Loading…