The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 12, 2019

Filed:

Mar. 11, 2014
Applicant:

Ohkuchi Materials Co. Ltd., Kagoshima, JP;

Inventor:

Shigeru Hosomomi, Isa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/428 (2006.01); H01L 21/48 (2006.01); H01L 23/498 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); H01L 21/56 (2006.01); H01L 23/495 (2006.01);
U.S. Cl.
CPC ...
H01L 21/4832 (2013.01); G03F 7/2022 (2013.01); G03F 7/32 (2013.01); H01L 21/4821 (2013.01); H01L 21/4825 (2013.01); H01L 21/4846 (2013.01); H01L 21/565 (2013.01); H01L 23/49548 (2013.01); H01L 23/49894 (2013.01); H01L 23/49866 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A process of forming, on a surface of the substrate a plurality of resist layers made of two kinds of dry film resist that differ in main peak wavelength in spectral photosensitivity. An exposure process of selectively exposing and affecting a particular resist layer in accordance with a first pattern upon using a first exposure mask overlaid on the plurality of resist layers. A second exposure process of exposing another resist layer in accordance with a second pattern upon using a second exposure mask overlaid on the plurality of resist layers. Partially uncovering the surface of the substrate by removing unexposed portions of the plurality of resist layers, to form a resist mask having an aperture. Finally, forming a coat layer by plating a portion of the substrate where the surface thereof is uncovered; and a process of removing the resist mask.


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