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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10204758 B1

PDFFull Text
Date of Patent:
Feb. 12, 2019

Filed:

Oct. 04, 2017

Positive and negative ion source based on radio-frequency inductively coupled discharge

Applicant:

Dalian University of Technology, Dalian, Liaoning Province, CN;

Inventors:

Fei Gao, Dalian, CN;

Younian Wang, Dalian, CN;

Assignee:

DALIAN UNIVERSITY OF TECHNOLOGY, Dalian, Liaoning Province, CN;

Attorney:

Birch, Stewart, Kolasch & Birch, LLP

Primary Examiner:

Eliza Osenbaugh-Stewart

Int. Cl.
CPC ...
H01J 27/00 (2006.01); H01J 49/10 (2006.01); H01J 27/20 (2006.01); H01J 37/08 (2006.01); H01J 37/24 (2006.01); H01J 37/05 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 27/205 (2013.01); H01J 37/05 (2013.01); H01J 37/08 (2013.01); H01J 37/24 (2013.01); H01J 37/321 (2013.01); H01J 2237/082 (2013.01);
Abstract

The present invention discloses a positive and negative ion source based on radio-frequency inductively coupled discharge, comprising a tube, a middle portion of which is communicated with an intake pipe; discharge coils electrically connected to a matched network and a radio-frequency power supply successively are wound on the tube; one end of the tube is connected to a first cover plate in a sealed manner, and the first cover plate is connected with a positive ion extraction gate via an insulating medium; the positive ion extraction gate is electrically connected to a negative pole of a DC power supply; the other end of the tube is connected to a second cover plate in a sealed manner, the second cover plate is connected to a third cover plate in a sealed manner via a sidewall, and the third cover plate is connected with a negative ion extraction gate via an insulating medium; and the negative ion extraction gate is electrically connected to a positive pole of the DC power supply. In the present invention, the positive ions and the electrons and negative ions can be extracted simultaneously, and the problems of contamination of the ion source by particles sputtered from the backplane and overheating of the backplane are thus solved.

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