The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2019
Filed:
May. 03, 2017
Applicants:
Boe Technology Group Co., Ltd., Beijing, CN;
Hefei Boe Optoelectronics Technology Co., Ltd., Hefei, CN;
Inventors:
Assignee:
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
G03F 7/20 (2013.01); G03F 7/70733 (2013.01); H01L 21/67748 (2013.01);
Abstract
The present disclosure refers to a substrate supporting structure and an exposure machine. In one embodiment, the substrate supporting structure includes a plurality of lifting members and a first drive mechanism, top ends of the plurality of lifting members are in a same horizontal plane, and the first drive mechanism is capable of driving at least one of the lifting members to move horizontally. The substrate supporting structure according to the present disclosure is for supporting a substrate.