The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 12, 2019

Filed:

Jun. 22, 2015
Applicant:

Kobe Steel, Ltd., Kobe-shi, JP;

Inventors:

Kazushi Hayashi, Kobe, JP;

Aya Miki, Kobe, JP;

Nobuyuki Kawakami, Kobe, JP;

Assignee:

Kobe Steel, Ltd., Kobe-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2014.01); G01R 31/265 (2006.01); H01L 21/28 (2006.01); H01L 29/786 (2006.01); G01R 1/06 (2006.01); G01R 31/27 (2006.01); H01L 21/66 (2006.01); H01L 29/66 (2006.01); H01L 27/32 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2656 (2013.01); G01R 1/06 (2013.01); G01R 31/2623 (2013.01); G01R 31/27 (2013.01); H01L 21/28 (2013.01); H01L 22/12 (2013.01); H01L 22/14 (2013.01); H01L 29/66969 (2013.01); H01L 29/786 (2013.01); H01L 29/7869 (2013.01); H01L 29/78693 (2013.01); H01L 27/32 (2013.01);
Abstract

Provided is a method for simply evaluating defects caused in interface states in oxide semiconductor thin films and protective films in TFTs having protective films formed on the surface of oxide semiconductor thin films without actually measuring the characteristics of the same. This evaluation method evaluates defects caused in the interface states by measuring electron states in the oxide semiconductor thin film by a contact method or noncontact method. The defects caused in the interface states are any of the following: (1) threshold value voltage (V) when a positive bias is applied to the thin-film transistor, (2) difference in threshold value voltage (ΔV) before and after applying the positive bias to the thin-film transistor, and (3) threshold value during the first measurement when a plurality of measurements is made of the threshold value voltage when a positive bias is applied to the thin-film transistor.


Find Patent Forward Citations

Loading…