The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2019
Filed:
Sep. 30, 2014
Applicant:
Industry-academic Cooperation Foundation, Yonsei University, Seoul, KR;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 33/00 (2006.01); H01L 29/786 (2006.01); G01K 7/01 (2006.01);
U.S. Cl.
CPC ...
G01N 33/005 (2013.01); G01K 7/015 (2013.01); G01N 33/0036 (2013.01); H01L 29/786 (2013.01); H01L 29/78693 (2013.01);
Abstract
A hydrogen sensor includes a hydrogen-sensing unit and a transistor connected to the hydrogen-sensing unit. The hydrogen-sensing unit includes a substrate made of an elastic material, a thin film made of transition metal or alloy thereof, disposed on the surface of the substrate and having a plurality of nanogaps formed therein, and an electrode formed on the thin film. The hydrogen-sensing unit is connected with a source (or drain) or a gate of the transistor via a connector.