The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2019
Filed:
May. 20, 2015
Applicant:
Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C23C 28/00 (2006.01); C23C 28/04 (2006.01); H01L 51/52 (2006.01);
U.S. Cl.
CPC ...
C23C 28/42 (2013.01); C23C 16/403 (2013.01); C23C 16/405 (2013.01); C23C 28/042 (2013.01); H01L 51/5256 (2013.01); B32B 2307/7242 (2013.01); Y10T 428/265 (2015.01);
Abstract
A gas barrier film includes two or more first barrier layers each made of a first inorganic material and one or more second barrier layers each made of a second inorganic material different from the first inorganic material. Each of the two or more first barrier layers and each of the one or more second barrier layers are alternately stacked. The first inorganic material comprises aluminum oxide. Each of the two or more first barrier layers has a thickness of 3 nm or more. The total thickness of the two or more first barrier layers is 20 nm or less. The two or more first barrier layers and the one or more second barrier layers are formed by atomic layer deposition.