The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2019
Filed:
Jun. 02, 2016
Applicant:
Nivarox-far S.a., Le Locle, CH;
Inventor:
Alex Gandelhman, Neuchatel, CH;
Assignee:
Nivarox-FAR S.A., Le Locle, CH;
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01); H01L 21/3065 (2006.01); H01L 21/32 (2006.01); G04D 99/00 (2006.01); B81C 1/00 (2006.01); C23F 1/00 (2006.01);
U.S. Cl.
CPC ...
G04D 99/00 (2013.01); B81C 1/00103 (2013.01); C23F 1/00 (2013.01); B81B 2201/035 (2013.01); B81B 2203/0384 (2013.01); B81C 2201/014 (2013.01); B81C 2201/0132 (2013.01); B81C 2201/0138 (2013.01);
Abstract
The invention relates to a silicon-based component with at least one chamfer formed from a method combining at least one oblique side wall etching step with a 'Bosch' etching of vertical side walls, thereby enabling aesthetic improvement and improvement in the mechanical strength of components formed by micromachining a silicon-based wafer.