The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2019
Filed:
Jun. 05, 2015
Canon Kabushiki Kaisha, Tokyo, JP;
Hiromitsu Yamaguchi, Yokohama, JP;
Yoshikazu Miyajima, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides an imprint apparatus which forms a pattern of an imprint material on a substrate using a mold, comprising a supply unit including a plurality of orifices and configured to supply the imprint material on the substrate by discharging the imprint material from each orifice, and a control unit configured to control the discharge of the imprint material from each orifice in accordance with arrangement information showing an arrangement of the imprint material on the substrate, wherein the control unit updates the arrangement information to bring a product of an ideal volume of the imprint material discharged from each orifice in one-time discharge and the number of discharges of the imprint material supplied on the substrate from the supply unit closer to a total amount of the imprint material actually supplied on the substrate in accordance with the arrangement information.