The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2019
Filed:
Nov. 30, 2016
Texas Instruments Incorporated, Dallas, TX (US);
Mohammad Hadi Motieian Najar, Santa Clara, CA (US);
Ira Oaktree Wygant, Palo Alto, CA (US);
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Abstract
Methods and apparatus to calibrate micro-electromechanical systems are disclosed. An example pressure sensor calibration apparatus includes a pressure chamber in which a first pressure sensor is to be disposed; one or more first sensors to determine a capacitance value from the first pressure sensor from a physical test performed on the first pressure sensor; the one or more first sensors to determine a first pull-in voltage value from a first electrical test performed on the first pressure sensor; a correlator to determine correlation coefficient values based on the capacitance value determined during the physical test on the first pressure sensor and the first pull-in voltage value determined during a first electrical test on the first pressure sensor; and a calibrator to determine calibration coefficient values to calibrate a second pressure sensor based on the correlation coefficient values and a second electrical test on the second pressure sensor.