The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2019
Filed:
Jun. 29, 2015
Tamura Corporation, Tokyo, JP;
Koha Co., Ltd., Tokyo, JP;
Shinya Watanabe, Tokyo, JP;
Kimiyoshi Koshi, Tokyo, JP;
Yu Yamaoka, Tokyo, JP;
Kazuyuki Iizuka, Tokyo, JP;
Masaru Takizawa, Tokyo, JP;
Takekazu Masui, Tokyo, JP;
TAMURA CORPORATION, Tokyo, JP;
KOHA CO., LTD., Tokyo, JP;
Abstract
A β-GaO-based single-crystal substrate includes a β-GaO-based single crystal, and a principal surface being a plane parallel to a b-axis of the β-GaO-based single crystal. A maximum value of Δω on an arbitrary straight line on the principal surface that passes through a center of the principal surface is not more than 0.7264. The Δω is a difference between a maximum value and a minimum value of values obtained by subtracting ωfrom ωat each of measurement positions, where ωrepresents an angle defined by an X-ray incident direction and the principal surface at a peak position of an X-ray rocking curve on the straight line and ωrepresents an angle on an approximated straight line obtained by using least-squares method to linearly approximate a curve representing a relationship between the ωand the measurement positions thereof.