The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2019
Filed:
Jul. 14, 2015
Applicant:
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Inventor:
Ohseob Kwon, Yongin, KR;
Assignee:
SAMSUNG DISPLAY CO., LTD., Yongin, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C 21/00 (2006.01); C23C 14/04 (2006.01); C23C 16/04 (2006.01); H01L 51/00 (2006.01); G03F 7/40 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); C23C 16/042 (2013.01); G03F 7/40 (2013.01); H01L 51/00 (2013.01); B05C 21/005 (2013.01); H01L 51/0011 (2013.01);
Abstract
A mask assembly for thin film deposition, the mask assembly, including a mask frame having an opening; a mask coupled to the mask frame and having a first surface facing a substrate and a second surface opposite to the first surface, a plurality of deposition pattern portions, and a rib between the adjacent deposition pattern portions, the mask having a partially etched area, the plurality of deposition pattern portions being within the partially etched area; and a partial etching extension portion in an outer portion of an area corresponding to the plurality of deposition pattern portions.