The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Oct. 15, 2015
Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;
Tomomi Ito, Tokyo, JP;
Yukio Miura, Tokyo, JP;
SUMITOMO OSAKA CEMENT CO., LTD., Tokyo, JP;
Abstract
An electrostatic chuck deviceincludes: an electrostatic chuck sectionhaving one principal surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in electrostatic attracting internal electrode; a first adhesion layer; a sheet material; a second adhesion layer; and a temperature adjusting base sectionwhich adjusts a temperature of the electrostatic chuck sectionto a desired temperature, in this order, in which the first adhesion layerincludes a joining layerhaving a layer thickness in a range of 1 nm to 500 nm, and a silicone adhesive layerhaving a thickness in a range of 2 μm to 30 μm, and the second adhesion layerincludes a joining layerhaving a layer thickness in a range of 1 nm to 500 nm, and a silicone adhesive layerhaving a thickness in a range of 2 μm to 30 μm.