The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Feb. 19, 2016
Applied Materials, Inc., Santa Clara, CA (US);
Fareen Adeni Khaja, San Jose, CA (US);
David Mordo, Cupertino, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods for operating a substrate processing cluster tool include positioning a substrate storage cassette within a factory interface of the substrate processing cluster tool, wherein the substrate storage cassette defines an interior volume dimensioned and arranged to receive one or more substrates, and sensing, by execution of stored instructions by a processor operatively associated with a plurality of sensors, at least one of occurrence of a condition of a plurality of conditions within the interior volume or persistence of a condition of the plurality of conditions within the interior volume. Responsive to the sensing, at least one of generating an alert or performing an alternate operation involving the substrate storage cassette.