The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Aug. 25, 2016
Canon Kabushiki Kaisha, Tokyo, JP;
Yuhei Sumiyoshi, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A distortion detection method includes obtaining a positional deviation amount expression formula that expresses positional deviation amounts in two directions at each position on a substrate held by a chuck, based on information about a warping shape of the substrate in a state where the substrate is not yet held by the chuck, calculating positional deviation amounts in two directions at a plurality of positions on the substrate based on the obtained positional deviation amount expression formula, and obtaining a plurality of types of distortion components relating to a shot region of the substrate based on the positional deviation amounts in two directions obtained at the plurality of positions.