The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Dec. 28, 2017
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Yoshio Kawabe, Kumagaya, JP;
Hiroshi Chiba, Ageo, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 5/08 (2006.01); G21K 1/06 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70316 (2013.01); G02B 5/0816 (2013.01); G02B 5/0833 (2013.01); G02B 5/0875 (2013.01); G02B 5/0891 (2013.01); G03F 7/20 (2013.01); G03F 7/702 (2013.01); G21K 1/062 (2013.01); G21K 2201/061 (2013.01);
Abstract
A reflective mirror is provided with a base and a multilayer film including a first layer and a second layer laminated alternately on the base and capable of reflecting at least a portion of incident light. The multilayer film is provided with a first portion having a first thickness, and with a second portion having a second thickness that is different from the first thickness, and which is provided at a position rotationally symmetric to that of the first portion about an optical axis of the reflective mirror.