The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Jan. 07, 2015
Applicant:
Toyo Gosei Co., Ltd., Ichikawa-shi, Chiba, JP;
Inventors:
Assignee:
Toyo Gosei Co., Ltd., Ichikawa-shi, Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/027 (2006.01); G03F 7/028 (2006.01); G03F 7/004 (2006.01); G03F 7/075 (2006.01); H01L 21/033 (2006.01); C08F 230/02 (2006.01); H01L 21/027 (2006.01); C08F 230/00 (2006.01); C08F 2/48 (2006.01); C08F 2/50 (2006.01); H01J 37/32 (2006.01); B82Y 40/00 (2011.01); B82Y 30/00 (2011.01);
U.S. Cl.
CPC ...
G03F 7/027 (2013.01); C08F 2/48 (2013.01); C08F 2/50 (2013.01); C08F 230/00 (2013.01); C08F 230/02 (2013.01); G03F 7/004 (2013.01); G03F 7/028 (2013.01); G03F 7/0751 (2013.01); H01J 37/32009 (2013.01); H01L 21/0271 (2013.01); H01L 21/0273 (2013.01); H01L 21/0337 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); H01J 2237/334 (2013.01);
Abstract
Compositions are for formation of etch-resistant resins. Such resins are useful for manufacturing components or devices.