The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Aug. 23, 2016
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-Do, KR;
Inventors:
Soon-Young Lee, Ansan-si, KR;
Sang-Woo Pae, Seongnam-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01); G01R 31/3181 (2006.01); G01R 31/303 (2006.01);
U.S. Cl.
CPC ...
G01R 31/002 (2013.01); G01R 31/31816 (2013.01); G01R 31/303 (2013.01);
Abstract
A semiconductor test device includes an actuator holding a radiation source and adjusting a distance between the radiation source and a sample, and a controller controlling an operation of the actuator and calculating a soft error rate (SER) of the sample based on the distance between the radiation source and the sample. The controller calculates a first distance between the radiation source and the sample at which the SER of the sample becomes zero, and calculates a metal-to-dielectric ratio of the sample based on the first distance.