The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 29, 2019

Filed:

Aug. 16, 2016
Applicant:

Korea Research Institute of Standards and Science, Daejeon, KR;

Inventors:

Byong Chon Park, Daejeon, KR;

DalHyun Kim, Daejon, KR;

ChaeHo Shin, Hwaseong-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 60/32 (2010.01); G01Q 10/06 (2010.01);
U.S. Cl.
CPC ...
G01Q 60/32 (2013.01); G01Q 10/065 (2013.01);
Abstract

Provided is a measuring method for an atomic force microscope that scans a surface of a sample with a probe to measure a surface property of the sample, the measuring method including detecting a motion of the probe while vibrating the probe on the surface of the sample, acquiring surface information on the sample by using a variation in the motion of the probe, and controlling the probe by using the surface information on the sample. The surface information on the sample may include a position and a slope of the surface. The vibrating of the probe on the surface of the sample may include performing a circular motion by the probe around axes perpendicular to a scan direction of the probe and to a height direction of the sample.


Find Patent Forward Citations

Park, Byong. (2019). Measuring method for atomic force microscope (U.S. Patent No. 10191081). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10191081

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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