The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Mar. 31, 2016
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Silvia Rocio Aguilar Amaya, San Jose, CA (US);
Derek John Witkowicki, Newark, CA (US);
Damon Tyrone Genetti, Livermore, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/34 (2006.01);
U.S. Cl.
CPC ...
G01B 7/345 (2013.01);
Abstract
Methods, kits, systems, and apparatuses, for measuring and/or verifying end effector flatness using electrical continuity are provided.