The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Oct. 15, 2014
Applicant:
Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;
Inventors:
Assignee:
SUMITOMO OSAKA CEMENT CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/44 (2006.01); H01L 21/683 (2006.01); C04B 35/645 (2006.01); H02N 13/00 (2006.01); H05K 7/20 (2006.01); H01L 21/687 (2006.01); C04B 35/626 (2006.01);
U.S. Cl.
CPC ...
C04B 35/44 (2013.01); C04B 35/6261 (2013.01); C04B 35/6262 (2013.01); C04B 35/62655 (2013.01); C04B 35/62675 (2013.01); C04B 35/645 (2013.01); H01L 21/6831 (2013.01); H01L 21/6833 (2013.01); H01L 21/68757 (2013.01); H02N 13/00 (2013.01); H05K 7/2039 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3222 (2013.01); C04B 2235/3224 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3227 (2013.01); C04B 2235/5436 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/761 (2013.01); C04B 2235/764 (2013.01); C04B 2235/768 (2013.01); C04B 2235/77 (2013.01); C04B 2235/9669 (2013.01); C04B 2235/9684 (2013.01); C04B 2235/9692 (2013.01);
Abstract
Provided are a corrosion-resistant member and an electrostatic chuck device using the same, in which corrosion resistance to halogen corrosive gas such as fluorine corrosive gas or chlorine corrosive gas and plasma thereof is high, dielectric constant and volume resistivity are high, and dielectric loss is low. The corrosion-resistant member is formed of a composite oxide sintered compact containing aluminum, samarium, and a rare earth metal element other than samarium, in which the rare earth metal element other than samarium has an ionic radius of 0.88×10m or more.