The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Nov. 10, 2016
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/00 (2006.01); B06B 1/02 (2006.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01); H01L 41/316 (2013.01); H01L 41/332 (2013.01); H02N 1/08 (2006.01); H02N 1/00 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0292 (2013.01); H01L 41/0815 (2013.01); H01L 41/0973 (2013.01); H01L 41/316 (2013.01); H01L 41/332 (2013.01); H02N 1/006 (2013.01); H02N 1/08 (2013.01); Y10T 29/42 (2015.01);
Abstract
An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode.