The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 22, 2019

Filed:

Apr. 27, 2016
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Tomohiro Sakai, Matsumoto, JP;

Koji Sumi, Shiojiri, JP;

Tetsuya Isshiki, Shiojiri, JP;

Toshiaki Takahashi, Chino, JP;

Tomokazu Kobayashi, Shiojiri, JP;

Kazuya Kitada, Suwa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/04 (2006.01); H01L 41/08 (2006.01); H01L 41/187 (2006.01); H01L 41/318 (2013.01); B41J 2/14 (2006.01); H01L 41/18 (2006.01);
U.S. Cl.
CPC ...
H01L 41/04 (2013.01); B41J 2/14233 (2013.01); H01L 41/0805 (2013.01); H01L 41/18 (2013.01); H01L 41/1873 (2013.01); H01L 41/318 (2013.01); B41J 2/14201 (2013.01); B41J 2002/14241 (2013.01); B41J 2202/03 (2013.01);
Abstract

There is provided a piezoelectric element which includes a first electrode, a piezoelectric layer which is formed on the first electrode by using a solution method, and is formed from a compound oxide having a perovskite structure in which potassium, sodium, and niobium are provided, and a second electrode which is provided on the piezoelectric layer. A cross-sectional SEM image of the piezoelectric layer is captured at a magnification of 100,000. When evaluation is performed under a condition in which a measured value in a transverse direction is set to 1,273 nm, two or more voids are included in the piezoelectric layer, a difference between the maximum value and the minimum value among diameters of the voids to be largest in a film thickness direction is equal to or smaller than 14 nm, and the maximum value is equal to or smaller than 24 nm.


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