The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2019
Filed:
Jul. 21, 2014
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Michael Halpin, Scottsdale, AZ (US);
Assignee:
ASM IP HOLDING B.V., , NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/687 (2006.01); B23P 19/04 (2006.01); F16D 1/02 (2006.01); F16D 1/033 (2006.01); F16D 1/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68792 (2013.01); F16D 1/02 (2013.01); F16D 1/033 (2013.01); F16D 1/12 (2013.01); B23P 19/04 (2013.01); H01L 21/68 (2013.01); Y10T 29/49826 (2015.01);
Abstract
The invention is directed to an alignment assembly for changing the relative position of a plate of a pedestal assembly with respect to a processing chamber of a reactor. The alignment assembly is connected at a first end to a riser shaft of the heating assembly and at a second end to a drive shaft. One or more portions of the alignment assembly may be selectively axially rotated or laterally moved change the relative position of the plate with respect to the processing chamber as desired.