The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 22, 2019

Filed:

Jan. 06, 2017
Applicants:

Boe Technology Group Co., Ltd., Beijing, CN;

Hefei Boe Optoelectronics Technology Co., Ltd., Hefei, Anhui, CN;

Inventors:

Xilong Ding, Beijing, CN;

Eryuan Huang, Beijing, CN;

Chengsheng Wang, Beijing, CN;

Zhaozeng Wu, Beijing, CN;

Yubao Zi, Beijing, CN;

Zuhong Liu, Beijing, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B05B 1/20 (2006.01); H01L 21/67 (2006.01); B05B 13/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6708 (2013.01); B05B 1/20 (2013.01); B05B 13/0207 (2013.01);
Abstract

A nozzle for use in an etching apparatus and an etching apparatus including the nozzle are provided. The nozzle includes: a hollowed main body having a connector at one end thereof and a main-body outlet at the other end thereof, a main-body connection part being provided at an outer wall of the main body, said one end of the main body being connected with a pipe via the connector and a nozzle sleeve including a nozzle-sleeve connection part and a nozzle-sleeve outlet, the nozzle sleeve being connected to an outer side of said the other end of the main body having the main-body outlet through the nozzle-sleeve connection part and the main-body connection part and the nozzle sleeve is movable relative to the main body in an outflow direction of the main body.


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