The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2019
Filed:
Nov. 03, 2015
Applicant:
Semes Co., Ltd., Cheonan-si, Chungcheongnam-do, KR;
Inventors:
Kihoon Choi, Cheonan-si, KR;
In-Il Jung, Cheonan-si, KR;
Seong-Soo Kim, Cheonan-si, KR;
Yoon-Jong Ju, Cheonan-si, KR;
Assignee:
Semes Co., Ltd., Chungcheongnam-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B24C 1/00 (2006.01); H01L 21/67 (2006.01); B24C 11/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02057 (2013.01); B24C 1/003 (2013.01); B24C 11/005 (2013.01); H01L 21/02052 (2013.01); H01L 21/67051 (2013.01);
Abstract
Disclosed is an apparatus and method for treating a substrate. The method includes supplying cleaning particles to the substrate to clean the substrate. The cleaning particles are solid particles. The solid particles provide a shock wave to the substrate.