The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2019
Filed:
Mar. 29, 2016
Applied Materials, Inc., Santa Clara, CA (US);
Subramaniam Iyer, Bangalore, IN;
Devendrappa Holeyannavar, Bangalore, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method for operating a smart tool monitoring system is described. The method includes monitoring, by a controller within a smart tool monitoring system, a first parameter associated with a first component internal to the smart tool monitoring system. The method also includes determining, by the controller, whether the first parameter satisfies a first criterion. The method also includes performing a first action in response to a determination that the first parameter satisfies the first criterion. The method also includes receiving a measurement value from a sensor of an article of manufacturing equipment that includes a second component external to the smart tool monitoring system. The method also includes determining, by the controller, whether the measurement value satisfies a second criterion. The method also includes performing a second action in response to a determination that the measurement value satisfies the second criterion.