The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2019
Filed:
Dec. 18, 2015
Applicant:
Em Microelectronic-marin S.a., Marin, CH;
Inventors:
Pinchas Novac, Neuchatel, CH;
Amrane Belkacem, Montbeliard, CH;
Yves Dupraz, Valeyres-sous-Montagny, CH;
Assignee:
EM MICROELECTRONIC MARIN S.A., Marin, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/22 (2006.01);
U.S. Cl.
CPC ...
G01N 27/223 (2013.01);
Abstract
The present invention relates to a humidity sensor comprising a silicon base plate on which at least a plurality of dielectric layers, each provided with a metallic zone, and a metallic layer are arranged, said metallic layer being etched in order to form two electrodes, each comprising one armature provided with a multitude of arms, these armatures being mounted so that the arms of each armature are interlaced in order to have arms placed opposite each other and separated by gaps.