The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 22, 2019

Filed:

Sep. 23, 2015
Applicant:

Agilent Technologies, Inc., Santa Clara, CA (US);

Inventors:

Charles Hoke, Menlo Park, CA (US);

Christopher Ryan Moon, Los Gatos, CA (US);

Andrew Ghetler, San Jose, CA (US);

Yang Han, Sunnyvale, CA (US);

Assignee:

Agilent Technologies, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 3/28 (2006.01); G01J 3/02 (2006.01); G01J 3/10 (2006.01); G01J 3/42 (2006.01);
U.S. Cl.
CPC ...
G01J 3/2823 (2013.01); G01J 3/0213 (2013.01); G01J 3/0224 (2013.01); G01J 3/108 (2013.01); G01J 3/28 (2013.01); G01J 3/42 (2013.01);
Abstract

An imaging scanner and a method for using the same are disclosed. The scanner includes a variable attenuator adapted to receive a light beam generated by a MIR laser and that generates an attenuated light beam therefrom characterized by an attenuation level. The scanner includes an optical assembly that focuses the attenuated light beam to a point on a specimen. A light detector measures an intensity of light leaving the point on the specimen, the light detector being characterized by a detector dynamic range. A controller forms a plurality of MIR images from the intensity as a function of position on the specimen, each of the plurality of MIR images being formed with a different level of attenuation of the light beam. The controller combines the plurality of MIR images to generate a combined MIR image having a dynamic range greater than the detector dynamic range.


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