The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 22, 2019

Filed:

Dec. 04, 2015
Applicant:

Vat Holding Ag, Haag, CH;

Inventor:

Thomas Blecha, Feldkirch, AT;

Assignee:

VAT Holding AG, Haag, CH;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
E05F 7/02 (2006.01); E06B 5/10 (2006.01); F16K 51/02 (2006.01); F16K 3/18 (2006.01); E05F 15/50 (2015.01); E05D 15/06 (2006.01); E05D 15/58 (2006.01); E06B 7/22 (2006.01); E06B 7/28 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
E06B 5/10 (2013.01); E05D 15/0604 (2013.01); E05D 15/58 (2013.01); E05F 15/50 (2015.01); E06B 7/22 (2013.01); E06B 7/28 (2013.01); F16K 3/18 (2013.01); F16K 51/02 (2013.01); E05Y 2900/132 (2013.01); H01L 21/67126 (2013.01);
Abstract

A door for closing a chamber opening in a chamber wall of a vacuum chamber in relation to a surrounding space, in which the vacuum chamber is located, includes a door housing arranged, a closing member arranged in the surrounding space, and a rod, to which the closing member is connected. A first movement of the rod, through which the closing member is displaced from an open position into an intermediate position, occurs as a displacement of the rod in a longitudinal axis direction, and a second movement of the rod subsequent thereto is a displacement at an angle to the longitudinal axis or a pivoting about a pivot axis which is perpendicular to the longitudinal axis from the intermediate position into a closed position. The rod is moveably mounted via the bearing elements, that are arranged in an inner space of the door housing that is sealed with respect to the surrounding space or is connected to the surrounding space via a passage, with a filter, extending through a housing wall of the door housing. The rod is guided out of the inner space in a sealed manner.


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