The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 22, 2019

Filed:

Apr. 08, 2016
Applicant:

Gwangju Institute of Science and Technology, Gwangju, KR;

Inventors:

Moon-Ho Ham, Gwangju, KR;

Myung-Woo Son, Gwangju, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C23C 16/26 (2006.01); C23C 16/48 (2006.01); C23C 14/06 (2006.01); C25D 5/50 (2006.01); C23C 28/00 (2006.01); C30B 23/06 (2006.01); C30B 25/18 (2006.01); C30B 29/02 (2006.01); C23C 16/01 (2006.01); C23C 16/02 (2006.01); C01B 32/186 (2017.01);
U.S. Cl.
CPC ...
C23C 16/26 (2013.01); C01B 32/186 (2017.08); C23C 16/01 (2013.01); C23C 16/0209 (2013.01); C23C 16/0281 (2013.01); C23C 28/322 (2013.01); C23C 28/343 (2013.01); C25D 5/50 (2013.01); C30B 23/066 (2013.01); C30B 25/18 (2013.01); C30B 29/02 (2013.01); H01L 21/0262 (2013.01); H01L 21/02491 (2013.01); H01L 21/02527 (2013.01);
Abstract

A method for synthesizing a multilayer graphene is provided. Specifically, the multilayer graphene can be produced by performing a step of forming a catalytic metal layer on a substrate, a step of heat-treating the catalytic metal layer on the substrate while supplying methane gas, and a step of synthesizing a multilayer graphene on the heat-treated catalytic metal layer. As described above, the multilayer graphene having a large area can be grown directly on a substrate, by heat-treating the catalytic metal layer using methane gas, prior to the step of synthesis of graphene. In addition, as the the number of layer of the multilayer graphene can be controlled by changing the synthesis time of the multilayer graphene, the multilayer graphene with the desired number of layers can be easily produced.


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