The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 22, 2019

Filed:

Mar. 30, 2014
Applicant:

Sharp Kabushiki Kaisha, Osaka-shi, JP;

Inventors:

Yuhki Kobayashi, Osaka, JP;

Katsuhiro Kikuchi, Osaka, JP;

Shinichi Kawato, Osaka, JP;

Satoshi Inoue, Osaka, JP;

Takashi Ochi, Osaka, JP;

Eiichi Matsumoto, Mitsuke, JP;

Masahiro Ichihara, Mitsuke, JP;

Assignee:

SHARP KABUSHIKI KAISHA, Sakai, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); C23C 14/24 (2006.01); H01L 51/00 (2006.01); H01L 51/56 (2006.01); C23C 14/12 (2006.01); C23C 16/04 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); C23C 14/044 (2013.01); C23C 14/12 (2013.01); C23C 14/24 (2013.01); C23C 16/042 (2013.01); H01L 51/0011 (2013.01); H01L 51/56 (2013.01);
Abstract

A vapor deposition unit () includes a vapor deposition mask (), a vapor deposition source (), and a limiting plate unit (). The limiting plate unit () includes (i) a plurality of first limiting plates () separated from each other in an X axis direction and (ii) a plurality of second limiting plates () disposed directly above the first limiting plates () in a plan view and separated from each other in the X axis direction. At least two second limiting plates () are arranged in the X axis direction for each first limiting plate ().


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