The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 22, 2019

Filed:

Sep. 30, 2016
Applicant:

Apple Inc., Cupertino, CA (US);

Inventors:

John A. Higginson, Santa Clara, CA (US);

Andreas Bibl, Los Altos, CA (US);

David Albertalli, Santa Clara, CA (US);

Assignee:

Apple Inc., Cupertino, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25J 15/00 (2006.01); B81C 99/00 (2010.01); H01L 23/00 (2006.01); H02N 13/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B25J 15/0085 (2013.01); B81C 99/002 (2013.01); H01L 21/67132 (2013.01); H01L 21/67144 (2013.01); H01L 21/67259 (2013.01); H01L 24/75 (2013.01); H01L 24/95 (2013.01); H02N 13/00 (2013.01); H01L 2224/7598 (2013.01); H01L 2224/75251 (2013.01); H01L 2224/75252 (2013.01); H01L 2224/75753 (2013.01);
Abstract

Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool includes an articulating transfer head assembly, a carrier substrate holder, and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder. The articulating transfer head assembly may include an electrostatic voltage source connection and a substrate supporting an array of electrostatic transfer heads.


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